Electron Bombardment

Magnetic sputter target

Magnetic sputter target

Flange: ICF70, ICF114, ICF152
Target size: 1-5 inch
RF power supply: 200-1000W
Water cooling

Sputter picture

Distance between target and substrate

(mm) 

 Material

Ar pressure

(pa) 

RF power

(W) 

Film growth

(mm/min) 
200 Cu 4 150 12
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Magnetron sputter target MST-ICF70-35 - DN-35CF
Magnetron sputter target MST-ICF70-35 - DN-35CF

Magnetron sputter target MST-ICF70-35 - DN-35CF

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Magnetron sputter target MST-ICF70-38 - DN-38CF
Magnetron sputter target MST-ICF70-38 - DN-38CF

Magnetron sputter target MST-ICF70-38 - DN-38CF

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Magnetron sputter target MST-ICF70-40 - DN-40CF
Magnetron sputter target MST-ICF70-40 - DN-40CF

Magnetron sputter target MST-ICF70-40 - DN-40CF

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Magnetron sputter target MST-ICF114 - DN-63CF
Magnetron sputter target MST-ICF114 - DN-63CF

Magnetron sputter target MST-ICF114 - DN-63CF

Call for Price: +39 0342 803365

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Magnetron sputter target MST-ICF152 - DN-100CF
Magnetron sputter target MST-ICF152 - DN-100CF

Magnetron sputter target MST-ICF152 - DN-100CF

Call for Price: +39 0342 803365

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RF power supply and matching box RF-PS-MB
RF power supply and matching box RF-PS-MB

RF power supply and matching box RF-PS-MB

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